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class="hLocation"> <p><a href="http://www.ex-cimer.com" target="_blank">EEPW首頁(yè)</a> > <a href="/info/industry/special/eda">EDA/PCB</a> > <a href="/info/articlelist/special/eda/type/4">市場(chǎng)分析</a> > 與EUV相比，這一光刻技術(shù)更具發(fā)展?jié)摿?/p> </div> </div> </div>   <script src="https://forum.eepw.com.cn/jscontent/wenzilian" type="text/javascript"></script>  <div class="6616111" id="container"> <section> <article> <h1>與EUV相比，這一光刻技術(shù)更具發(fā)展?jié)摿?/h1> <div id="1661616" class="authorTimeSource"> <span>作者：</span> <span>時(shí)間：2023-06-25</span> <span>來(lái)源：半導(dǎo)體產(chǎn)業(yè)縱橫</span> <link rel="stylesheet" type="text/css"/> <span style="float:right; width:130px;margin-right:0px; text-align:right;"> <div id="1616166" class="nav0"> <ul> <li><a href="javascript:void(0);"><img src="http://www.ex-cimer.com/event/action/images/icon_add_4.png" width="20" border="0" align="absmiddle" />加入技術(shù)交流群</a> <ul> <li style="text-align:center;"><img 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scrolling='no' width='300' height='200'><a target='_blank'><img src='https://ad.eepw.com.cn/www/delivery/avw.php?zoneid=87&cb=INSERT_RANDOM_NUMBER_HERE&n=a576c0a2' border='0' alt='' /></a></iframe> </div> <span id="contentlabels" style="font-size:14px;"><p style="text-align: left;"><span style="font-family: 微軟雅黑, "Microsoft YaHei"; font-size: 16px;"></span>對(duì)于半導(dǎo)體行業(yè)而言，<a class="contentlabel" href="http://www.ex-cimer.com/news/listbylabel/label/光刻技術(shù)"><em>光刻技術(shù)</em></a>和設(shè)備發(fā)揮著基礎(chǔ)性作用，是必不可少的。</p>本文引用地址：<a href="http://www.ex-cimer.com/article/202306/447939.htm">http://www.ex-cimer.com/article/202306/447939.htm</a><p style="text-align: left;">所謂光刻，就是將設(shè)計(jì)好的圖形從掩模版轉(zhuǎn)印到晶圓表面的光刻膠上所使用的技術(shù)。<a class="contentlabel" href="http://www.ex-cimer.com/news/listbylabel/label/光刻技術(shù)"><em>光刻技術(shù)</em></a>最先應(yīng)用于印刷工業(yè)，之后長(zhǎng)期用于制造印刷電路板（PCB），1950 年代，隨著半導(dǎo)體技術(shù)的興起，<a class="contentlabel" href="http://www.ex-cimer.com/news/listbylabel/label/光刻技術(shù)"><em>光刻技術(shù)</em></a>開(kāi)始用于制造晶體管和集成電路（IC）。目前，光刻是 IC 制造過(guò)程中最基礎(chǔ)，也是最重要的技術(shù)。</p><p style="text-align: left;">在半導(dǎo)體產(chǎn)業(yè)發(fā)展史上，光刻技術(shù)的發(fā)展經(jīng)歷了多個(gè)階段，接觸/接近式光刻、光學(xué)投影光刻、分步（重復(fù)）投影光刻出現(xiàn)時(shí)間較早，集成電路生產(chǎn)主要采用掃描式光刻、浸沒(méi)式掃描光刻、深紫外光刻（DUV）和極紫外光刻（<a class="contentlabel" href="http://www.ex-cimer.com/news/listbylabel/label/EUV"><em>EUV</em></a>）工藝。</p><p style="text-align: left;">此外，X 射線(xiàn)/電子束光刻、納米壓印、激光直寫(xiě)等技術(shù)也在不斷發(fā)展當(dāng)中，有望在不久的將來(lái)實(shí)現(xiàn)更多技術(shù)和應(yīng)用突破。</p><p style="text-align: left;">本文主要討論直寫(xiě)光刻技術(shù)，它使用激光直接轟擊對(duì)象表面，在目標(biāo)基片上一次形成納米圖案構(gòu)造，無(wú)需制備價(jià)格昂貴的掩膜版，生產(chǎn)準(zhǔn)備周期較短。目前，該工藝技術(shù)已經(jīng)被廣泛應(yīng)用于 PCB、先進(jìn)封裝、FPD（顯示面板）和掩膜版制造。</p><p style="text-align: left;">在整個(gè)半導(dǎo)體領(lǐng)域，主流光刻技術(shù)為掩膜光刻，其中最先進(jìn)的是投影式光刻，它可以通過(guò)投影的原理在使用相同尺寸掩膜版的前提下獲得更小比例的圖像，在最小線(xiàn)寬、對(duì)位精度等指標(biāo)上領(lǐng)先直寫(xiě)光刻。但是，數(shù)字直寫(xiě)無(wú)掩膜光刻（LDI）在先進(jìn)封裝領(lǐng)域的應(yīng)用越來(lái)越廣泛，主要原因在于 LDI 技術(shù)可以通過(guò)激光在印刷板上寫(xiě)入圖案，不需要使用傳統(tǒng)的光阻膜，從而提高了生產(chǎn)效率和印刷精度，并降低了成本。而掩膜光刻中的掩膜需要更新且制作時(shí)間較長(zhǎng)，在對(duì)準(zhǔn)靈活性、大尺寸封裝及自動(dòng)編碼等方面存在一定的局限。因此，近年來(lái)，激光直寫(xiě)光刻技術(shù)在晶圓級(jí)封裝等先進(jìn)封裝領(lǐng)域的應(yīng)用如魚(yú)得水。</p><p style="text-align: left;">目前，光刻精度在 5μm 以下的，多采用掩膜光刻技術(shù)，而 5μm 以上，精度要求沒(méi)那么高的，多采用迭代更快、成本更低的直寫(xiě)光刻技術(shù)。當(dāng)然，這些并不是絕對(duì)的，還要根據(jù)具體應(yīng)用情況而定。</p><h2 style="text-align: left;">直寫(xiě)光刻技術(shù)的應(yīng)用</h2><p style="text-align: left;">下面看一下直寫(xiě)光刻技術(shù)在先進(jìn)封裝、FPD 和掩膜版制造過(guò)程中的應(yīng)用情況。</p><p style="text-align: left;">首先看先進(jìn)封裝。</p><p style="text-align: left;">在先進(jìn)封裝中，光刻機(jī)主要用于倒裝（Flip Chip，F(xiàn)C）的凸塊（Bumping）、重分布層（Redistribution layer，簡(jiǎn)稱(chēng) RDL）、2.5D/3D 封裝的 TSV 等的制作。與在前道制造過(guò)程中用于 IC 成型不同，光刻工藝在封裝中主要用于金屬電極接觸。在 Bumping pitch、RDL L/S 尺寸不斷減小的情況下，對(duì)封裝用光刻設(shè)備的更小線(xiàn)寬處理、工藝精度提出了更高要求。</p><p style="text-align: left;">在凸塊制作過(guò)程中，光刻主要應(yīng)用于互連和凸塊工藝流程。制作凸塊的方式有蒸發(fā)、印刷和電鍍?nèi)N，目前，業(yè)界廣泛采用印刷和電鍍方式，以電鍍?yōu)槔?，制作凸塊的主要工藝流程包括：濺鍍金屬隔離層，光刻，電鍍凸塊，光阻去除，UBM 蝕刻等。在凸塊的曝光過(guò)程中，需要將掩膜放在光阻層上，通過(guò)曝光機(jī)對(duì)光阻曝光，使其被照射區(qū)域發(fā)生化學(xué)反應(yīng)，曝光結(jié)束后，通過(guò)顯影工藝去除未曝光部分。在此過(guò)程中，光刻的作用是通過(guò)掩膜模板將光刻膠（光阻）在光的作用下進(jìn)行曝光和顯影，形成需要的光刻圖形。</p><p style="text-align: left;">RDL 是先進(jìn)封裝的關(guān)鍵技術(shù)，用于二維平面內(nèi)的電路連接和信號(hào)傳輸。凸塊用于連接 die 和基板，RDL 則作為導(dǎo)線(xiàn)連接凸塊和芯片上的輸入/輸出墊（I/O Pad，一種電氣連接器件，用于建立芯片和基板間的電氣連接）。</p><p style="text-align: left;">RDL 的制作流程與電鍍凸塊類(lèi)似。首先，晶種層被堆積或?yàn)R射到晶圓表面，然后使用光刻設(shè)備曝光，再使用電鍍系統(tǒng)將銅金屬化層沉積其中，形成 RDL 線(xiàn)路層，去除光刻膠后再對(duì)球下金屬層（Under Bump Metallurgy，簡(jiǎn)稱(chēng) UBM，在晶圓上鍍膜，目的是使焊球具有良好的接合特性）進(jìn)行蝕刻。</p><p style="text-align: left;">引線(xiàn)框架對(duì)先進(jìn)封裝也很重要。引線(xiàn)框架是一種借助于鍵合材料（如金絲、鋁絲、銅絲等）實(shí)現(xiàn)芯片內(nèi)部電路引出端和外引線(xiàn)的電氣連接、形成電氣回路的結(jié)構(gòu)器件，它是集成電路的載體，用于連通芯片內(nèi)部和外部導(dǎo)線(xiàn)。</p><p style="text-align: left;">引線(xiàn)框架的制造工藝主要包括傳統(tǒng)的沖壓法，以及應(yīng)用直寫(xiě)光刻技術(shù)的蝕刻法。隨著智能手機(jī)、可穿戴設(shè)備等終端產(chǎn)品向小型化、高集成化方向發(fā)展，引線(xiàn)框架正在向超薄化方向演進(jìn)，對(duì)曝光的精度和靈活性要求不斷提升。相比于沖壓法，蝕刻法的精度更高，可生產(chǎn)多腳位、超薄產(chǎn)品，因此，蝕刻工藝成為引線(xiàn)框架未來(lái)發(fā)展的主要方向，對(duì)直寫(xiě)光刻設(shè)備的需求量也在增長(zhǎng)。</p><p style="text-align: left;">出于成本和實(shí)用性考量，目前，包含日月光、通富微電、華天科技、長(zhǎng)電科技在內(nèi)的國(guó)內(nèi)外封測(cè)大廠都在積極嘗試使用直寫(xiě)光刻代替掩膜光刻。</p><p style="text-align: left;">下面看一下直寫(xiě)光刻在 FPD 領(lǐng)域的應(yīng)用。</p><p style="text-align: left;">FPD 的工藝流程通常包括以下幾個(gè)步驟：襯底準(zhǔn)備，光刻，沉積，退火，組裝。其中，光刻是將電路圖案投影到襯底上。</p><p style="text-align: left;">在 FPD 制造過(guò)程中，在 ITO 陽(yáng)極的圖形化和有機(jī)發(fā)光層的蒸鍍工藝中，都需要用到直寫(xiě)光刻。以 OLED 顯示為例，其原理是有機(jī)發(fā)光材料在電場(chǎng)驅(qū)動(dòng)下，通過(guò)載流子注入和復(fù)合導(dǎo)致發(fā)光，其中涉及兩個(gè)與直寫(xiě)光刻有關(guān)的需求：1、ITO 陽(yáng)極的圖形化工藝，OLED 的陽(yáng)極為 ITO 透明電極，制造的第一步是將 ITO 集成到玻璃基板上，工藝流程與 IC 制造類(lèi)似，其中曝光部分使用直寫(xiě)光刻或掩膜光刻；2、有機(jī)發(fā)光層蒸鍍工藝，為了將有機(jī)材料鍍?cè)诳昭▊鬏?注入層上，可使用噴墨打印或蒸鍍工藝，后者為產(chǎn)業(yè)化應(yīng)用中的主流，需要高精度掩膜版將有機(jī)材料蒸鍍?cè)谥付ㄎ恢?，這就需要直寫(xiě)光刻制版。</p><p style="text-align: left;">目前，全球范圍內(nèi)，特別是在中國(guó)大陸，正在大力開(kāi)展 AMOLED/LTPS 生產(chǎn)線(xiàn)建設(shè)，京東方、華星光電、天馬、維信諾、和輝光電等企業(yè)在 AMOLED/LTPS 高分辨率、折疊屏、全面屏、高飽和度等新技術(shù)上不斷加大投入，未來(lái)，中國(guó)大陸面板廠商將進(jìn)一步加速更先進(jìn)一代 AMOLED/LTPS 產(chǎn)線(xiàn)建設(shè)。因此，平板顯示行業(yè)對(duì)掩膜版，特別是先進(jìn)、高精度產(chǎn)品的需求將持續(xù)增長(zhǎng)。Omdia 發(fā)布的 2022 年報(bào)告顯示，預(yù)計(jì) 2026 年全球 8.6 代及以下平板顯示行業(yè)掩膜版銷(xiāo)售收入為 1112 億日元，占全球平板顯示行業(yè)掩膜版銷(xiāo)售額的 92%，平板顯示行業(yè)用掩膜版需求保持穩(wěn)定增長(zhǎng)態(tài)勢(shì)。</p><p style="text-align: left;">近年來(lái)，Mini-LED 技術(shù)正在大規(guī)模應(yīng)用于高端消費(fèi)電子領(lǐng)域，蘋(píng)果公司不斷發(fā)布搭載了 Mini-LED 顯示面板的 iPad Pro 和 MacBook Pro，三星、LG、TCL 也先后推出了 Mini-LED 電視。Omdia 發(fā)布的 2022 年報(bào)告顯示，未來(lái) Micro-LED 電視、智能手表和智能眼鏡等終端應(yīng)用的需求將帶動(dòng) Micro-LED 顯示面板的發(fā)展，同時(shí)，電視顯示面板出貨量的增長(zhǎng)將拉動(dòng)市場(chǎng)對(duì) Mini-LED 顯示面板的需求。這些都在為直寫(xiě)光刻設(shè)備創(chuàng)造著廣闊的市場(chǎng)應(yīng)用空間。</p><p style="text-align: left;">最后看一下直寫(xiě)光刻在掩膜版制造過(guò)程中的應(yīng)用情況。</p><p style="text-align: left;">掩膜版的生產(chǎn)主要包括以下幾個(gè)流程：圖形光刻，顯影，蝕刻，脫膜，清洗。其中，圖形光刻是通過(guò)光刻機(jī)進(jìn)行激光光束直寫(xiě)，以完成圖形曝光，掩膜版制造都是采用正性光刻膠，通過(guò)激光作用使需要曝光區(qū)域的光刻膠內(nèi)部發(fā)生交聯(lián)反應(yīng)。</p><p style="text-align: left;">在光刻過(guò)程中，曝光機(jī)的核心是曝光光源，光源通常使用紫外線(xiàn)燈管，其波長(zhǎng)一般在 350nm~400nm 之間。曝光機(jī)使用的紫外線(xiàn)燈管能夠產(chǎn)生高強(qiáng)度的紫外線(xiàn)輻射，并具有均勻的光強(qiáng)度分布，以便在整個(gè)掩膜版上形成一致的曝光強(qiáng)度。</p><p style="text-align: left;">掩膜是制造出掩膜圖形的關(guān)鍵，掩膜通常是由透明或半透明材料制成，上面印有需要制造的電路板圖形。曝光機(jī)使用的掩膜必須具有高精度和高對(duì)比度，以確保最終制造出來(lái)的電路板符合規(guī)格要求。</p><p style="text-align: left;">隨著芯片制程工藝提升和成熟制程持續(xù)擴(kuò)產(chǎn)，亞太地區(qū)的掩膜版供需缺口在增大，預(yù)計(jì)低規(guī)格掩膜版的交貨時(shí)間將翻倍。掩膜版的供不應(yīng)求，推動(dòng)產(chǎn)業(yè)擴(kuò)產(chǎn)，在這種情況下，直寫(xiě)光刻曝光機(jī)作為掩膜版生產(chǎn)過(guò)程中不可或缺的設(shè)備，需求量也會(huì)隨之增加。</p><p style="text-align: left;">以中國(guó)大陸掩膜版生產(chǎn)為例，相關(guān)企業(yè)，如清溢光電、路維科技的資金募集計(jì)劃中就包含掩膜版擴(kuò)產(chǎn)項(xiàng)目，清溢光電的合肥清溢光電有限公司 8.5 代及以下高精度掩膜版項(xiàng)目預(yù)計(jì)投資 7.4 億元人民幣，可以新增年產(chǎn)能 1852 個(gè)。路維科技的高精度半導(dǎo)體掩膜版與大尺寸平板顯示掩膜版擴(kuò)產(chǎn)項(xiàng)目預(yù)計(jì)投資 2.66 億元，用于 G11 和 AMOLED 平板顯示掩膜版的生產(chǎn)。</p><p style="text-align: left;">2021 年，清溢光電、路維光電的資本支出分別為 3.05 億元、1.35 億元，清溢光電招股說(shuō)明書(shū)顯示，該公司設(shè)備采購(gòu)支出約占總投資的 70%，光刻機(jī)約占設(shè)備投資的 89%。</p><h2 style="text-align: left;">直寫(xiě)光刻技術(shù)代表企業(yè)</h2><p style="text-align: left;">如前文所述，整個(gè)半導(dǎo)體行業(yè)所采用的光刻技術(shù)可以分為兩大類(lèi)：掩膜光刻和直寫(xiě)光刻（以 LDI 為主）。不同廠商根據(jù)不同技術(shù)的特點(diǎn)，以及自身情況，選擇了不同的發(fā)展路徑。</p><p style="text-align: left;">走掩膜光刻技術(shù)路線(xiàn)的主要玩家有日本 ORC、上海微電子和美國(guó) Rudolph 等企業(yè)，走 LDI 技術(shù)路線(xiàn)的主要玩家有 Orbotech（奧寶科技，KLA 子公司）和日本的 Screen。</p><p style="text-align: left;">這里主要介紹專(zhuān)注于直寫(xiě)光刻技術(shù)的企業(yè)。</p><p style="text-align: left;">Orbotech 涉足的領(lǐng)域包括 PCB、FPD、半導(dǎo)體設(shè)備制造，早些年主要關(guān)注 PCB 和 FPD 專(zhuān)用的自動(dòng)光學(xué)檢測(cè)儀等，在 2014 年收購(gòu) SPTS 公司之后，進(jìn)入了半導(dǎo)體設(shè)備領(lǐng)域。經(jīng)過(guò) 30 多年的發(fā)展，Orbotech 已成為全球最大的先進(jìn)精密制造解決方案廠商。2018 年，美國(guó)半導(dǎo)體設(shè)備巨頭 KLA-Tencor 以 34 億美元收購(gòu)了 Orbotech。</p><p style="text-align: left;">在中國(guó)大陸，也有一家專(zhuān)注于直寫(xiě)光刻技術(shù)的企業(yè)，它就是芯碁微裝，該公司專(zhuān)注于以微納直寫(xiě)光刻為技術(shù)核心的直接成像設(shè)備及直寫(xiě)光刻設(shè)備的研發(fā)和制造，主要產(chǎn)品功能涵蓋微米到納米的多領(lǐng)域光刻技術(shù)，具體包括：絲網(wǎng)印刷（最小線(xiàn)寬 70μm -50μm），PCB（最小線(xiàn)寬 40μm -25μm），單層板、多層板、HDI 板、柔性板（最小線(xiàn)寬 15μm -6μm），類(lèi)載板（最小線(xiàn)寬 3μm -1μm），低世代 OLED 顯示面板（最小線(xiàn)寬 350nm），擬進(jìn)入 OLED 顯示面板高世代線(xiàn)。</p><h2 style="text-align: left;">結(jié)語(yǔ)</h2><p style="text-align: left;">當(dāng)下，最為引人關(guān)注的光刻技術(shù)和設(shè)備是用于 7nm 及以下先進(jìn)制程芯片制造的 <a class="contentlabel" href="http://www.ex-cimer.com/news/listbylabel/label/EUV"><em>EUV</em></a>，以及用于 10nm 以上及老舊制程的 DUV 光刻機(jī)。但是，整個(gè)半導(dǎo)體領(lǐng)域涉及范圍很廣，在很多產(chǎn)業(yè)鏈環(huán)節(jié)都需要用到光刻設(shè)備，且所采用的技術(shù)各有不同。</p><p style="text-align: left;">與制造芯片前道工序所用的 <a class="contentlabel" href="http://www.ex-cimer.com/news/listbylabel/label/EUV"><em>EUV</em></a> 和 DUV 相比，直寫(xiě)光刻技術(shù)的先進(jìn)性和精度沒(méi)那么高，但其應(yīng)用領(lǐng)域更加廣泛，憑借其靈活性和技術(shù)迭代速度快等特點(diǎn)，直寫(xiě)光刻的應(yīng)用還有很大的拓展空間。</p><p style="text-align: left;">在大力發(fā)展本土半導(dǎo)體制造業(yè)的當(dāng)下，中國(guó)大陸需要在光刻這一基礎(chǔ)性制造領(lǐng)域取得突破，短時(shí)期內(nèi)，要想造出 EUV 難度很大，但類(lèi)似于直寫(xiě)光刻這樣的技術(shù)和設(shè)備，設(shè)計(jì)和制造難度沒(méi)那么高，又有廣闊的應(yīng)用市場(chǎng)空間，或許可以作為今后的重點(diǎn)研究對(duì)象。</p></span>  <div class="1161616" id="coverDiv" class="article_reg" style="width:100%;overflow:hidden;display:none;z-index:10;position:absolute;left:0;background:#fff;"> <center> <img 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