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scrolling='no' width='300' height='200'><a target='_blank'><img src='https://ad.eepw.com.cn/www/delivery/avw.php?zoneid=87&cb=INSERT_RANDOM_NUMBER_HERE&n=a576c0a2' border='0' alt='' /></a></iframe> </div> <span id="contentlabels" style="font-size:14px;"><span id="asfoqof" class=Apple-style-span style="WORD-SPACING: 0px; FONT: medium Simsun; TEXT-TRANSFORM: none; COLOR: rgb(0,0,0); TEXT-INDENT: 0px; WHITE-SPACE: normal; LETTER-SPACING: normal; BORDER-COLLAPSE: separate; orphans: 2; widows: 2; -webkit-border-horizontal-spacing: 0px; -webkit-border-vertical-spacing: 0px; -webkit-text-decorations-in-effect: none; -webkit-text-size-adjust: auto; -webkit-text-stroke-width: 0px"><span id="okpclrx" class=Apple-style-span style="FONT-SIZE: 12px; COLOR: rgb(95,95,95); LINE-HEIGHT: 18px; FONT-FAMILY: 宋體, Arial, sans-serif">新式半導(dǎo)體光刻技術(shù)中，<a class="contentlabel" href="http://www.ex-cimer.com/news/listbylabel/label/極紫外光刻"><em>極紫外光刻</em></a>(EUV)被認(rèn)為是最有前途的方法之一，不過(guò)其實(shí)現(xiàn)難度也相當(dāng)高，從上世紀(jì)八十年代開(kāi)始探尋至今已經(jīng)將近三十年，仍然未能投入實(shí)用。<a class="contentlabel" href="http://www.ex-cimer.com/news/listbylabel/label/極紫外光刻"><em>極紫外光刻</em></a>面臨的關(guān)鍵挑戰(zhàn)之一就是尋找合適的<a class="contentlabel" href="http://www.ex-cimer.com/news/listbylabel/label/光刻膠"><em>光刻膠</em></a>(photoresist)，也就是用來(lái)在芯片層表面光刻出特定圖案的材料。它必須對(duì)極紫外輻射非常敏感，這樣才能刻出圖案，但同時(shí)又必須能夠抵御隨后的蝕刻和其他處理步驟。<P style="PADDING-RIGHT: 0px; PADDING-LEFT: 0px; FONT-SIZE: 14px; PADDING-BOTTOM: 0px; MARGIN: 0px 0px 20px; COLOR: rgb(0,0,0); TEXT-INDENT: 2em; LINE-HEIGHT: 24px; PADDING-TOP: 0px"> Intel公司內(nèi)部一直在用微曝光設(shè)備(MET)對(duì)各種不同材料進(jìn)行試驗(yàn)和評(píng)估，目的就是尋找一種能夠同時(shí)滿(mǎn)足高敏感度、高分辨率、低線(xiàn)寬粗糙度 (LWR)的<a class="contentlabel" href="http://www.ex-cimer.com/news/listbylabel/label/光刻膠"><em>光刻膠</em></a>材料，最近終于取得了重大突破。</P><P style="PADDING-RIGHT: 0px; PADDING-LEFT: 0px; FONT-SIZE: 14px; PADDING-BOTTOM: 0px; MARGIN: 0px 0px 20px; COLOR: rgb(0,0,0); TEXT-INDENT: 2em; LINE-HEIGHT: 24px; PADDING-TOP: 0px"> 在國(guó)際光學(xué)工程學(xué)會(huì)(SPIE)舉行的光刻大會(huì)上，Intel就進(jìn)行了這方面的展示，使用一種正型化學(xué)放大<a class="contentlabel" href="http://www.ex-cimer.com/news/listbylabel/label/光刻膠"><em>光刻膠</em></a>(CAR)結(jié)合極紫外底層，以及一種相應(yīng)的漂洗劑，最終達(dá)成了22nm半節(jié)距(half pitch)分辨率，并滿(mǎn)足敏感度和LWR要求。</P><P style="PADDING-RIGHT: 0px; PADDING-LEFT: 0px; FONT-SIZE: 14px; PADDING-BOTTOM: 0px; MARGIN: 0px 0px 20px; COLOR: rgb(0,0,0); TEXT-INDENT: 2em; LINE-HEIGHT: 24px; PADDING-TOP: 0px"> Intel據(jù)此驕傲地宣布，經(jīng)過(guò)數(shù)十年的不懈努力，<a class="contentlabel" href="http://www.ex-cimer.com/news/listbylabel/label/極紫外光刻"><em>極紫外光刻</em></a>技術(shù)已經(jīng)從研究層面邁向?qū)嵱茫?dāng)然了，真正商用仍尚需時(shí)日。</P><P style="PADDING-RIGHT: 0px; PADDING-LEFT: 0px; FONT-SIZE: 14px; PADDING-BOTTOM: 0px; MARGIN: 0px 0px 20px; COLOR: rgb(0,0,0); TEXT-INDENT: 2em; LINE-HEIGHT: 24px; PADDING-TOP: 0px"><span id="krluofw" class=Apple-converted-space></SPAN><img onload="if(this.width>620)this.width=620;" onclick="window.open(this.src)" style="cursor:pointer" style="BORDER-TOP-WIDTH: 0px; BORDER-LEFT-WIDTH: 0px; BORDER-BOTTOM-WIDTH: 0px; MAX-WIDTH: 560px; WIDTH: 528px; HEIGHT: 550px; BORDER-RIGHT-WIDTH: 0px" height=550 src="http://editerupload.eepw.com.cn/fetch/20131227/209608_1_0.jpg" width=549 border=0><BR></P><P style="PADDING-RIGHT: 0px; PADDING-LEFT: 0px; FONT-SIZE: 14px; PADDING-BOTTOM: 0px; MARGIN: 0px 0px 20px; COLOR: rgb(0,0,0); TEXT-INDENT: 2em; LINE-HEIGHT: 24px; PADDING-TOP: 0px"> 藍(lán)色部分即代表光刻膠</P></SPAN></SPAN> </span>  <div class="hzxgezq" id="coverDiv" class="article_reg" style="width:100%;overflow:hidden;display:none;z-index:10;position:absolute;left:0;background:#fff;"> <center> <img src="https://webstorage.eepw.com.cn/images/display/reg.jpg" border="0" usemap="#Map" /> <map name="Map" id="Map"> <area shape="rect" coords="133,235,319,253" target="_blank" /> <area shape="rect" 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